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A Complete Analytical Model for Circular Diaphragm Pressure Sensor with Clamped edge


Volume 1 Issue 2 March - May 2013
Research Paper
A Complete Analytical Model for Circular Diaphragm Pressure Sensor with Clamped edge
Sumit Kumar Jindal*, S. K. Raghuwanshi**
* Research Scholar, Department of Electronics Engineering, Indian School of Mines, Dhanbad, Jharkhand, India.
** Assistant Professor, Department of Electronics Engineering, Indian School of Mines, Dhanbad, Jharkhand, India.
Jindal, S. K. and Raghuwanshi, S. K. (2013). A Complete Analytical Model For Circular Diaphragm Pressure Sensor With Clamped Edge. i-manager’s Journal on Circuits and Systems, 1(2), 19-27. https://doi.org/10.26634/jcir.1.2.2291
Abstract
MEMS offer various fabrication process to fabricate diaphragms for various applications such as microphones, capacitive sensors, pressure sensor, micro-pumps etc. The working principle of all the devices is based on the force uniformly applied on the diaphragm and cause the diaphragm to deflect. The parameter optimization of the diaphragm is a challenge in order to achieve the best performance of the device.

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